ELECTRICAL AND ELECTRONICS ENGINEERING


Tayfun Akın

Picture of the person
Room No: 
D-111
Tel No: 
+90 (312) 210-2369 or -6315 or -6310
E-mail: 
tayfun-akin metu.edu.tr
Education: 
Prof. Dr. Tayfun AKIN


1989-1994 Ph.D. in Electrical Engineering, The University of Michigan, Ann Arbor, Michigan.

Advisor: Prof. Khalil Najafi

Dissertation: An Integrated Telemetric Multi-Channel Sieve Electrode for Nerve Regeneration Applications

The purpose of the thesis is to develop a system to have direct access to the nervous system by recording electrical discharges of the individual axons of the peripheral nervous system. The system is composed of three main parts: a silicon micromachined sieve electrode, on-chip electronics and a transdermal link. The electrode has a number of holes (as small as 1mm in diameter) for deliberately severed nerves to regenerate through, and also activated iridium recording/stimulating sites around the through-holes. Any two of these sites can be selected by a user to record activity simultaneously. The recorded signals are then amplified, multiplexed, digitized and decoded by the on-chip electronics designed in a 3-µm CMOS process. These decoded signals are then sent to the outside world using an inductively coupled RF telemetry link. The link is also used to send power and channel selection data to the on-chip electronics.

1987-1989 MS. in Electrical Engineering , The University of Michigan, Ann Arbor, Michigan.

Directed study: An Introduction to Queuing Models for the Manufacturing

1982-1987 B.S. in Electrical Engineering, Middle East Technical University, Ankara, Turkey. Graduated with high honors.

Research Interests: 

  Micro-Electro-Mechanical Systems (MEMS) (What are MEMS?)

  • MicroSystems Technologies (MTS)
  • Silicon-based integrated microsensors and transducers
  • Infrared detectors and readout circuitry
  • Micromachined Gyroscopes
  • RF MEMS
  • Analog and digital integrated circuit design
  • Silicon micromachining
  • Implantable microtelemetry systems and transducers for biomedical applications
Publications: 

Book Chapter

T. Akin, CMOS-based Thermal Sensors” in Advanced Micro & Nanosystems Volume 2: CMOS-MEMS, Edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J. Kornivk, O. Tabata, Wiley-VCH, 2005. AMN-Flyer

 

International Journal Publications

54) M. M. Torunbalci, S. E. Alper, and T. Akin, “A Method for Wafer Level Hermetic Packaging of SOI-MEMS Devices with Embedded Vertical Feedthroughs using Advanced MEMS Process,” Accepted, Journal of Micromechanics and Microengineering, 2015.

53) K. Demirel, S. Demir, E. Yazgan, T. Akin, “A New Temperature-Tolerant RF MEMS Switch Structure Design and Fabrication for Ka-Band Applications,” Accepted, IEEE/ASME Journal of Microelectromechanical Systems, 2015.

52) S. Tez, U. Aykutlu, M. M. Torunbalci, T. Akin, “A Bulk-Micromachined Three-Axis Capacitive MEMS Accelerometer on a Single Die,” IEEE/ASME Journal of Microelectromechanical Systems,Vol. 24, No. 5, pp. 1264-1274, October 2015. 2015. paper52.pdf

51) K. Demirel, S. Demir; E. Yazgan, T. Akin, “Cantilever type radio frequency MEMS shunt capacitive switch design and fabrication,” J. Micro/Nanolith. MEMS MOEMS 14(3), 035005 (2015). doi: 10.1117/1.JMM.14.3.035005 paper51.pdf

50) M. M. Torunbalci, S. E. Alper, and T. Akin, “Advanced MEMS (aMEMS) Process for Wafer Level Hermetic Encapsulation of MEMS Devices using SOI Cap Wafers with Vertical Feedthroughs,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 24, No. 3, pp. 556-564, June 2015. paper50.pdf

49) M. M. Torunbalci, S. E. Alper, and T. Akin, “Wafer Level Hermetic Sealing of MEMS Devices with Vertical Feedthroughs using Anodic Bonding,” Sensors and Actuators A, Vol. 224, pp. 169-176, April 2015. paper49.pdf

48) C. Cetintepe, E. S. Topalli, S. Demir, O. A. Civi, and T. Akin, "A Fabrication Process based on Structural Layer Formation using Au–Au Thermocompression Bonding for RF MEMS Capacitive Switches and Their Performance," Int. Journal of Microwave and Wireless Technologies, Vol. 6, No. 5, pp. 473-480, July 2014. paper48.pdf

47) U. Sonmez, H. Kulah, and T. Akin, “A ΣΔ Micro Accelerometer with 6 µg/√Hz Resolution and 130 dB Dynamic Range,” Analog Integrated Circuits and Signal Processing, Vol. 81, No. 2, pp 471-485, November 2014. paper47.pdf

46) E. Battal, S. Bolat, M. Y. Tanrikulu, A. K. Okyay, and T. Akin, “Atomic Layer Deposited Zinc-Oxide as Tunable Uncooled Infrared Microbolometer Material,” Physica Status Solidi A: Applications and Materials Science, Vol. 211, No. 11, pp. 2475–2482, November 2014. paper46.pdf

45) I. Comart, K. Topalli, S. Demir, and T. Akin, “Microwave Characterization of a Wafer-Level Packaging Approach for RF MEMS Devices Using Glass Frit Bonding,” IEEE Sensors Journal, Vol. 14, No. 6, pp. 2006-2011, June 2014. paper45.pdf

44) J. Musayev, Y. Adıgüzel, H. Kulah, Selim Eminoglu, and T. Akin, “Label-free DNA Detection Using a Charge Sensitive CMOS Microarray Sensor Chip,” IEEE Sensors Journal, Vol. 14, No. 5, pp. 1608-1616, May 2014. paper44.pdf

43) J. Musayev, C. Altiner, Y. Adıgüzel, H. Kulah, Selim Eminoglu, and T. Akin, “Capturing and Detection of MCF-7 Breast Cancer Cells with a CMOS Image Sensor,” Sensors and Actuators A, Vol. 215, pp. 105-114, August 2014. paper43.pdf

42) S. Sonmezoglu, S. E. Alper, and T. Akin, “An Automatically Mode-Matched MEMS Gyroscope with Wide and Tunable Bandwidth,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 23, No. 2, pp. 284-297, April 2014. paper42.pdf

41) M. Unlu, S. Demir, and T. Akin, “A 15-40 GHz Frequency Reconfigurable RF MEMS Phase Shifter,” IEEE Transactions on Microwave Theory and Techniques, Vol. 61, No. 8, pp. 2865-2877, August 2013. paper41.pdf

40) O. Aydin and T. Akin, “A Bulk-Micromachined Fully Differential MEMS Accelerometer With Split Interdigitated Fingers,” IEEE Sensors Journal, Vol. 13, No. 8, pp. 2914-2921, August 2013. paper40.pdf

39) M. Unlu, S. Demir, and T. Akin, “Triple Stub Circuit Topology as Simultaneous Insertion Phase, Amplitude, and Impedance Control Circuit for Phased Array Applications,” IET Microw. Antennas Propag., Vol. 6, Iss. 13, pp. 1399–1406, 2012. paper39.pdf

38) K. Azgin, T. Akin, and L. Valdevit, “Ultra High Dynamic Range Resonant MEMS Load Cells for Micromechanical Test Frames,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 21, No. 6, pp. 1519-1529, Dec. 2012. paper38.pdf

37) A. Aydemir and T. Akin, “Prevention of Sidewall Redeposition of Etched By-Products in Dry Au Etch Process,” Journal of Micromechanics and Microengineering, Vol. 22, No. 7, 074004, pp. 1‑6, June 2012. doi:10.1088/0960-1317/22/7/074004. paper37.pdf

36) E. Tatar, S. E. Alper, and T. Akin, “Quadrature Error Compensation and Corresponding Effects on the Performance of Fully Decoupled MEMS Gyroscopes,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 21, No. 3, pp. 656-667, June 2012. paper36.pdf

35) O. Bayraktar, O. Aydin-Civi, and T. Akin, “Beam Switching Reflectarray Monolithically Integrated with RF MEMS Switches,” IEEE Transactions on Antennas & Propagation, Vol. 60, No. 2, pp. 854-862, Feb.2012. DOI: 10.1109/TAP.2011.2173099. paper35.pdf

34) C. E. Cansoy, H. Y. Erbil, O. Akar, T. Akin, “Effect of Pattern Size and Geometry on the Use of Cassie-Baxter Equation for Superhydrophobic Surfaces,” Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 386, pp. 116-124, August 2011.

33) A. Torrents, K. Azgin, S. W. Godfrey, E. S. Topalli, T. Akin, and L. Valdevit, “MEMS Resonant Load Cells for Micro-Mechanical Test Frames: Feasibility Study and Optimal Design,” Journal of Micromechanics and Microengineering, Vol. 20, No. 12, 125004, pp. 1-17, Dec. 2010. paper33.pdf

32) B. Bayram, O. Akar, and T. Akin, “Plasma-Activated Direct Bonding of Diamond-on-Insulator Wafers to Thermal Oxide Grown Silicon Wafers,” Diamond and Related Materials, Vol. 19, No. 11, pp. 1431-1435, Nov. 2010. paper32.pdf

31) I. E. Ocak, R. Kepenek, H. Kulah, and T. Akin, “A High Performance Sigma-Delta Readout Circuitry for µg Resolution Microaccelerometers,” Analog Integrated Circuits and Signal Processing, Vol. 64, No. 2, pp.137-145, August 2010 (doi: 10.1007/s10470-009-9433-4). paper31.pdf

30)  M. Unlu, K. Topalli, H. I. Atasoy, S. Demir, O. Aydin Civi, and T. Akin, “Hybrid Connection of RF MEMS and SMT Components in an Impedance Tuner,” AEU International Journal of Electronics and Communications, Vol. 64, No. 8, pp. 748-756, August 2010. paper30.pdf

29) K. Topalli, E. Erdil, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “Tunable Dual-Frequency RF MEMS Rectangular Slot Antennas,” Sensors and Actuators A, Vol. 156, No. 2, pp. 373-380, December 2009. paper29.pdf

28) K. Topalli, M. Unlu, H. I. Atasoy, S. Demir, O. A. Civi, and T. Akin, "Empirical Formulation of Bridge Inductance in Inductively Tuned RF MEMS Shunt Switches," Progress In Electromagnetics Research, PIER 97, pp. 343-356, 2009. paper28.pdf doi:10.2528/PIER09092502

27) E. Ekmekci, K. Topalli, T. Akin, and G. Turhan-Sayan, “A Tunable Multi-Band Metamaterial Design Using Micro-Split SRR Structures,” Optics Express, Vol. 17, No. 18, pp. 16046-58, August 2009. paper27.pdf

26) K. Sahin, E. Sahin, S. E. Alper, and T. Akin, “A Wide-Bandwidth and High-Sensitivity Robust Microgyroscope,” Journal of Micromechanics and Microengineering, Vol. 19, No. 7, 074004, pp. 1-8, July 2009. paper26.pdf

25) J. Perruisseau-Carrier, K. Topalli, and T. Akin, “Low-loss Ku-band Artificial Transmission Line with MEMS Tuning Capability,” IEEE Microwave and Wireless Components Letters, Vol. 19, No. 6, pp. 377-379, June 2009. paper25.pdf

24) E. Sagiroglu Topalli, K. Topalli, S. E. Alper, T. Serin, and T. Akin, “Pirani Vacuum Gauges using Silicon-on-Glass and Dissolved-Wafer Processes for the Characterization of MEMS Vacuum Packaging,” IEEE Sensors Journal, Vol. 9, No. 3, pp. 263-270, March 2009. paper24.pdf

23) S. E. Alper, Y. Temiz, and T. Akin, “A Compact Angular Rate Sensor System using a Fully-Decoupled Silicon-on-Glass MEMS Gyroscope,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 17, No. 6, pp. 1418-1429, Dec. 2008. paper23.pdf

22) B. Alaca, K. B. Toga, O. Akar, and T. Akin, “Strain-Controlled Bulge Test,” Journal of Materials Research, Vol. 23, No. 12, pp. 3295-3302, Dec. 2008. paper22.pdf

21) K. Topalli, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “A Monolithic Phased Array using 3-bit Distributed RF MEMS Phase Shifters,” IEEE Trans. Microwave Theory Tech. Techniques, Vol. 56, pp. 270-277, February 2008. paper21.pdf

20) S. Eminoglu, M. Y. Tanrikulu, and T. Akin, “A Low-Cost 128x128 Uncooled Infrared Detector Array in CMOS Process,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 17, No. 1, pp. 20-30, February 2008. paper20.pdf

19) B. Okcan and T. Akin, “A Low-Power Robust Humidity Sensor in a Standard CMOS Process,” IEEE Transactions on Electron Devices, Vol. 54, No. 11, pp. 3071-3078, November 2007. paper19.pdf

18) S. E. Alper, I. E. Ocak, and T. Akin, “Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope using EFABTM Multi-Layer Additive Electroforming,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 16, No. 5, pp. 1025-1035, October 2007. paper18.pdf

17) E. Erdil, K. Topalli, M. Unlu, O. Aydin Civi, and T. Akin, "Frequency Tunable Microstrip Patch Antenna using RF MEMS Technology," IEEE Trans. Antennas and Propagation, vol.55, no.4, p.1193-1196, April 2007. paper17.pdf

16) S. E. Alper, K. Azgin, and T. Akin, “A High-Performance Silicon-on-Insulator MEMS Gyroscope Operating at Atmospheric Pressure,” Sensors and Actuators A, Vol. 135/1, pp. 34-42, March 2007. paper16.pdf

15) S. E. Alper, K. M. Silay, and T. Akin, “A Low-Cost Rate-Grade Nickel Microgyroscope,” Sensors and Actuators A, Vol. 132/1, pp. 171-181, November 2006. paper15.pdf

14) K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A New Approach for Modeling Distributed MEMS Transmission Lines,” IEE Proc. Microwaves, Antennas & Propagation, Vol. 153, pp.152-162, April 2006. paper14.pdf

13) S. E. Alper and T. Akin, A Single-Crystal Silicon Symmetrical and Decoupled MEMS Gyroscope on an Insulating Substrate,” IEEE/ASME Journal of MicroElectroMechanical Systems, Vol. 14, No. 4, pp. 707-717, August 2005. paper13.pdf

12) S. E. Alper and T. Akin, "A Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate," Sensors and Actuators A, Vol. 115/2-3, pp. 336‑350, 2004. paper12.pdf

11) S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared Detectors in CMOS Process,” Sensors and Actuators A, Vol. 109/1-2, pp. 102-113, Dec. 2003. paper11.pdf

10) H. Külah and T. Akin, “A Current Mirroring Integration Based Readout Circuit for High Performance Infrared FPA Applications,” IEEE Transactions on Circuits and Systems II: Analog and Digital Signal Processing, Vol. 50, No. 4, pp. 181 -186, April 2003. paper10.pdf

9) D. Sabuncuoglu Tezcan, S. Eminoglu, and T. Akin, “A Low Cost Uncooled Infrared Microbolometer Detector in Standard CMOS Technology,” IEEE Trans. on Electron Devices, Vol. 50, No. 2, pp. 494-502, Feb. 2003. paper9.pdf

8) S. E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," Sensors and Actuators A, Vol. 97-98C, pp. 337-348, April 2002. paper8.pdf

7) O. Akar, T. Akin, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," Sensors and Actuators A, Vol.95/1, pp. 29-38, December 2001. paper7.pdf

6) T. Akin, B. Ziaie, S. A. Nikles, and K. Najafi, “A Modular Micromachined High-Density Connector System for Biomedical Applications,” IEEE Transactions on Biomedical Engineering, Vol. 46, No.4, pp.471-480, April 1999. paper6.pdf

5) T. Akin, Z. Olgun, O. Akar, and H. Kulah, "An Integrated Thermopile Structure with High Responsivity Using Any Standard CMOS Technology," Sensors and Actuators A 66, pp. 218-224, April 1998.  paper5.pdf

4) T. Akin, K. Najafi, and R.M. Bradley, "A Wireless Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," IEEE Journal of Solid-State Circuits, Vol. 33, No.1, pp.109-118, January 1998. Paper4.pdf

3) R. M. Bradley, X. Cao, T. Akin, and K. Najafi, "Long Term Chronic Recording from Peripheral Sensory Fibers Using a Sieve Electrode Array," The Journal of Neuroscience Methods, Vol. 73, pp. 177-186, 1997.

2) T. Akin, K. Najafi, R. Smoke, and R. M. Bradley, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," IEEE Trans. on Biomedical Engineering, Vol. BME-41, No. 4, pp. 305-313, April 1994. Paper2.pdf

1) R. M. Bradley, R. Smoke, T. Akin, and K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve through Micromachined Sieve Electrodes," Brain Research Journal, Vol. 594, pp. 84-90, 1992.

 

International Conference Publications

134) Y. Terzioglu, T. Kose, K. Azgin, and T. Akin, “A Simple Out-of-Plane Capacitive MEMS Accelerometer Utilizing Lateral and Vertical Electrodes for Differential Sensing,” Accepted, IEEE Sensors Conference, Busan, South Korea, November 2015.

133) A. Aydemir and T. Akin, “Fabrication of a Three-Axis Capacitive MEMS Accelerometer on a Single Substrate,” Accepted, IEEE Sensors Conference, Busan, South Korea, November 2015.

132) A. Aydemir and T. Akin, “An Ultimate Capacitive MEMS Vertical Accelerometer with Differential Sensing Capability,” Accepted, The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15), Toledo, Spain, September 20-23, 2015.

131) A. Aydemir and T. Akin, “DRIE Process Optimization to Achieve High Aspect Ratio for Capacitive MEMS Sensors,” Accepted, The 26th Micromechanics and Micro Systems Europe Workshop, (MME’15), Toledo, Spain, September 20-23, 2015.

130) A. Aydemir and T. Akin, “Process Development for the Fabrication of a Three Axes Capacitive MEMS Accelerometer,” Accepted, The 29th European Conference on Solid -State Transducers (Eurosensors 2015), Freiburg, Germany, September 06-09, 2015.

129) M. M. Torunbalci, S. E. Alper, and T. Akin, “The Advanced MEMS (aMEMS) Process for Fabricating Wafer Level Vacuum Packaged SOI-MEMS Devices with Embedded Vertical Feedthroughs,” Accepted,  The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), Alaska, USA, June 2015.

128) H. D. Gavcar, K.Azgin, S. E. Alper, and T. Akin, “An Automatic Acceleration Compensation System for A Single-Mass MEMS Gyroscope,” Accepted, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), Alaska, USA, June 2015.

127) F. Yesil, S. E. Alper, and T. Akin, “An Automatic Mode Matching System for a High Q-Factor MEMS Gyroscope using a Decoupled Perturbation Signal,” Accepted, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), Alaska, USA, June 2015.

126) Y. Demircan, S. Orguc, J. Musayev, E. Ozgur, M. Erdem, U. Gunduz, S. Eminoglu, H. Kulah, T. Akin, “Label-Free Detection of Leukemia Cells with a Lab-on-a-Chip System Integrating Dielectrophoresis and CMOS Imaging,” Accepted, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2015), Alaska, USA, June 2015.

125) O. Bayraktar, E. Kobal, Y. Sevinc, C. Cetintepe, I. Comart, K. Demirel, E. Sagiroglu Topalli, T. Akin, S. Demir, and O. A. Civi, “RF MEMS Based Millimeter Wave Phased Array for Short Range Communication,” Accepted, European Conf. on Antennas and Propagation (EuCAP), Lisbon, Portugal, 12-17 April 2015.

124) M. M. Torunbalci, S. E. Alper, and T. Akin, “Die Size Reduction by Optimizing the Dimensions of the Vertical Feedthrough Pitch and Sealing Area in the Advanced MEMS Process,” Accepted, 2015 IEEE Int'l Symposium on Inertial Sensors & Systems (ISISS 2015), Hawaii, March 23-26, 2015.

123) T. Kose, Y. Terzioglu, K. Azgin, and T. Akin, “A Single Mass Two-Axis Capacitive MEMS Accelerometer with Force Rebalance,” Accepted, 2015 IEEE Int'l Symposium on Inertial Sensors & Systems (ISISS 2015), Hawaii, March 23-26, 2015.

122) M. M. Torunbalci, S. E. Alper, and T. Akin, “A Novel Fabrication and Wafer Level Hermetic Sealing Method for SOI-MEMS Devices using SOI Cap Wafers,” Accepted, The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal, January 2015.

121) E. C. Demir, M. M. Torunbalci, I. Donmez, Y. E. Kalay, and T. Akin, “Fabrication and Characterization of Gold-Tin Eutectic Bonding for Hermetic Packaging of MEMS Devices,” Accepted, The 16th Electronics Packaging Technology Conference (EPTC 2014), Marina Bay, Singapore, December 2014.

120) M. M. Torunbalci, E. C. Demir, I. Donmez, S. E. Alper, and T. Akin, “Gold-Tin Eutectic Bonding for Hermetic Packaging of MEMS Devices with Vertical Feedthroughs,” IEEE Sensors 2014, Valencia, Spain, November 2014.

119) M. M. Torunbalci, S. E. Alper, and T. Akin, “A Method of Fabricating Vacuum Packages with Vertical Feedthroughs in a Wafer Level Anodic Bonding Process,” Eurosensors XXVIII, Brescia, Italy, September 2014.

118) Y. Terzioglu, S. E. Alper, K. Azgin, and T. Akin, “A Capacitive MEMS Accelerometer Readout with Concurrent Detection and Feedback using Discrete Components,” IEEE/ION Position, Location and Navigation Symposium (PLANS 2014), pp. 12-15, Montere, CA, U.S.A, May 2014.

117) B. Kebapci, O. Dervisoglu, E. Battal; A. K. Okyay, and T. Akin, “Broadband Absorption Enhancement in an Uncooled Microbolometer Infrared Detector,” SPIE Defense and Security Symposium, Infrared Technology and Applications XL, SPIE Vol. 9070, p. 907021, Baltimore, U.S.A, May 2014.

116) S. Eminoglu, M. A. Gulden, N. Bayhan, O. S. Incedere, S. T. Soyer, C. M. B. Ustundag, M. Isikhan, S. Kocak, O. Turan, C. Yalcin, and T. Akin, “MT3825BA: A 384×288-25µm ROIC for Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XL, SPIE Vol. 9070, p. 907024, Baltimore, U.S.A, May 2014.

115) M. Tepegoz, A. Kucukkomurler, F. Tankut, S. Eminoglu, and T. Akin, “A Miniature Low-Cost LWIR Camera with a 160×120 Microbolometer FPA,” SPIE Defense and Security Symposium, Infrared Technology and Applications XL, SPIE Vol. 9070, p. 90701O, Baltimore, U.S.A, May 2014.

114) M. M. Torunbalci, S. E. Alper, and T. Akin, “Wafer Level Hermetic Encapsulation of MEMS Inertial Sensors using SOI Cap Wafers with Vertical Feedthroughs,” IEEE Int. Symposium on INERTIAL SENSORS and SYSTEMS (ISISS’14), pp. 1-2, Laguna Beach, California, USA, February 2014.

113) S. Sonmezoglu, H. D. Gavcar, K. Azgin, S. E. Alper, and T. Akin, “Simultaneous Detection of Linear and Coriolis Accelerations on a Mode-Matched MEMS Gyroscope,” The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), pp. 32-35, San Francisco, U.S.A., January 2014.

112) S. Tez and T. Akin, “Fabrication of a Sandwich Type Three Axis Capacitive MEMS Accelerometer,” IEEE Sensors Conference, pp. 1-4, Baltimore, USA, November 2013.

111) E. Topalli, C. Cetintepe, O. Aydin-Civi, S. Demir, and T. Akin, “A Fabrication Process Flow for Stacked Structural Layer Formation Using Au-Au Thermocompression Bonding for RF MEMS Capacitive Switches”, 14th Int. Symposium on RF-MEMS and RF-Microsystems, Potsdam, Germany, July 1-3, 2013.

110) S. Sonmezoglu, S. E. Alper, and T. Akin, “High Performance Automatic Mode Matched MEMS Gyroscope with an Improved Thermal Stability of the Scale Factor,” The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2013), pp.2519-2522, Barcelona, Spain, 16-20 June 2013.

109) O. Erturk, E. Battal, S. E. Kucuk, A. K. Okyay, and T. Akin, “A Plasmonically Enhanced Pixel Structure for Uncooled Microbolometer Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013.

108) S. Eminoglu and T. Akin, “MT3250BA: A 320×256-50µm Snapshot Microbolometer ROIC for High-Resistance Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013.

107) S. Eminoglu, M. Isikhan, N. Bayhan, M. A. Gulden, O. S. Incedere, S. T. Soyer, S. Kocak, G. S. Yilmaz, and T. Akin, “MT6415CA: A 640×512-15µm CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIX, SPIE Vol. 8704, Baltimore, U.S.A, April 2013.

106) J. Musayev, Y. Adiguzel, H. Kulah, S. Eminoglu, T. Akin, “Cell Detection using a CMOS Image Sensor with Modified Pixel Structure Suitable for Bio-Chemical Surface Activation,” The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), pp. 941-944, Taipei, Taiwan, January 2013.

105) O. Aydin and T. Akin, “A Bulk-Micromachined Fully-Differential MEMS Accelerometer with Interdigitated Fingers,” The 11th Annual IEEE Conference on Sensors (SENSORS-12), Taipei, Taiwan, October 28-31, 2012.

104) S. Keskin, A. Aydemir, and T. Akin, “Veils-Free DRY (ICP) Etching of Gold Films with a Vertical Sharp Sidewall,” The 23rd Micromechanics and Micro Systems Europe Workshop, (MME’12), Ilmenau, Germany, September 9-12, 2012.

103) S. Tez and T. Akin, “Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer” The 26th European Conference on Solid -State Transducers (Eurosensors 2012), Krakow, Poland, September 09-12, 2012.

102) I. Comart, C. Cetintepe, S. Demir, and T. Akin, "A 35 GHz High Isolation RF MEMS SPDT Switch," The 13th International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July 2012.

101) C. Cetintepe, K. Demirel, S. Demir, and T. Akin, "A 5-Bit DMTL Phase Shifter with Analog Tuning Capabilities," The 13th International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July 2012.

100) K. K. Tokgoz, S. Demir, and T. Akin, "Surface Micromachining Implementation of S-Band 4-bit Phase Shifter," The 13th International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July 2012.

99) O. Kilic, I. Comart, S. Demir, and T. Akin, "3-bit CPW Phase Shifter Implemented by a Reduced Branch Line Coupler," The 13th International. Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012), Antalya, Turkey, 2-4 July 2012.

98) M. Tepegoz, A. Oguz, A. Toprak, S. U. Senveli, E. Canga, M. Y. Tanrikulu, and T. Akin, “An Uncooled Microbolometer Focal Plane Array Using Heating Based Resistance Nonuniformity Compensation,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp. 83531E-1-4, Baltimore, U.S.A, April 2012.

97) S. Z. Lulec, S. E. Kucuk, E. Battal, A. K. Okyay, M. Y. Tanrikulu, and T. Akin, “An Analysis for the Broad-Band Absorption Enhancement Using Plasmonic Structures on Uncooled Infrared Detector Pixels,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp. 83531D-1-4, Baltimore, U.S.A, April 2012.

96) S. Keskin and T. Akin, “The First Fabricated Dual-Band Uncooled Infrared Microbolometer Detector with a Tunable Micro-Mirror Structure,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp. 83531C-1-4, Baltimore, U.S.A, April 2012.

95) S. Eminoglu, Y. U. Mahsereci, C. Altiner, and T. Akin, “MT6425CA: a 640 × 512 - 25µm CTIA ROIC for SWIR InGaAs Detector Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVIII, SPIE Vol. 8353, pp. 83530D-1-4, Baltimore, U.S.A, April 2012.

94) S. Sonmezoglu, S. E. Alper, and T. Akin, “An Automatically Mode-Matched MEMS Gyroscope with 50 Hz Bandwidth,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 523-526, Paris, France, Jan. 29-Feb.2, 2012.

93) E. Tatar, M. M. Torunbalci, S. E. Alper, and T. Akin, “A Method and Electrical Model for the Anodic Bonding of SOI and Glass Wafers,” The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), pp. 68-71, Paris, France, Jan. 29-Feb.2, 2012.

92) B. Eminoglu, S. E. Alper, and T. Akin, “A New Baseband Equivalent Model for Sense Mode Dynamics and its Effects on Force-Feedback Controller Design for MEMS Gyroscopes,” The 10th Annual IEEE Conference on Sensors (SENSORS-11), Limerick, Ireland, October 28-31, 2011.

91)  M. M. Torunbalci, E. Tatar, S. E. Alper, and T. Akin, “Comparison of Two Alternative Silicon-on-Glass Microfabrication Processes for MEMS Inertial Sensors,” Eurosensors XXV, Athens, Greece, September 2011.

90) B. Eminoglu, S. E. Alper, and T. Akin, “An Optimized Analog Drive-Mode Controller for Vibratory MEMS Gyroscopes,” Eurosensors XXV, Athens, Greece, September 2011.

89) O. Aydin-Civi, S. Demir, T. Akin, “Reconfigurable Antennas Using RF-MEMS research in Turkey”, 2011 IEEE MTT-S International Microwave Symposium, Digest, pp.1-4, June 2011

88) A. Aydemir and T. Akin, “Prevention of Sidewall Redeposition of Etched Byproducts in Dry Au Etch Process,” The 22nd Micromechanics and Micro Systems Europe Workshop, (MME’11), Toensberg, Norway, June 19-22, 2011.

87) B. Eminoglu, S. E. Alper, and T. Akin, “A Novel, Simple, and Q-Independent Self Oscillation Loop Design for Vibratory MEMS Gyroscopes,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11), pp. 1440-1443, Beijing, China, June 5-9, 2011.

86) U. Sonmez, H. Kulah, and T. Akin, “A Fourth Order Unconstrained ΣΔ Capacitive Accelerometer,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11), pp. 707-710, Beijing, China, June 5-9, 2011.

85) E. Sahin, S. E. Alper, and T. Akin, “Experimental Evaluation of Alternative Drive-Mode Control Electronics Developed for High-Performance MEMS Gyroscopes,” The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11), pp. 2817-2820, Beijing, China, June 5-9, 2011.

84) S. E. Kucuk, M. Y. Tanrikulu, and T. Akin, “A Detailed Analysis for the Absorption Coefficient of Multilevel Uncooled Infrared Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp. 80121R/1-8, Orlando, U.S.A, April 2011.

83) A. Toprak, M. Tepegoz, and T. Akin, “A Two-Stage Digital-to-Analog Converter for Bias Correction in Uncooled Microbolometer Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp. 80121S/1-6, Orlando, U.S.A, April 2011.

82) S. U. Senveli, M. Y. Tanrikulu, and T. Akin, “A Thermal Conductance Optimization and Measurement Approach for Uncooled Microbolometers,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXVII, SPIE Vol. 8012, pp. 80121T/1-10, Orlando, U.S.A, April 2011.

81) K. Azgin, C. Ro, A. Torrents, T. Akin, and L. Valdevit, “A Resonant Tuning Fork Force Sensor with Unprecedented Combination Of Resolution and Range,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), pp. 545-548, Cancun, Mexico, January 2011.

80) E. Tatar, S. E. Alper, and T. Akin, “Effect of Quadrature Error on the Performance of a Fully-Decoupled MEMS Gyroscope,” The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), pp. 569-572, Cancun, Mexico, January 2011.

79) C. Guclu, C. Cetintepe, O. Aydin-Civi,  S. Demir, and T. Akin, “35 GHz Phased Array Antenna using DMTL Phase Shifters,” 10th Mediterranean Microwave Symposium (MMS2010), METU-NCC, pp.114-117, 25-27 August, 2010.

78) O. Bayraktar, O. Aydın-Civi, and T. Akın, “Beam Switching Reflectarray with MEMS Controls,” European Conference on Antennas & Propagation, Spain, April, 2010.

77) C. E. Cansoy, H. Y. Erbil, O. Akar, and T. Akin, “Investigation of Contact Angle Behavior on Superhydrophobic Patterned Surfaces,” 13th European Conference on Applications of Surface and Interface Analysis, October 18-23, 2009 Antalya, Turkey.

76) S. E. Alper, A. Aydemir, and T. Akin, “Stepped-Etching for Preserving Critical Dimensions in Through-Wafer Deep Reactive Ion Etching of Thick Silicon,” The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), pp. 1110-1113, Denver, June 2009.

75) A. Oguz, M. Tepegoz, and T. Akin, “A Bias Heating Cancellation Method for Resistive Uncooled Microbolometer Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982G/1-8, Orlando, U.S.A, April 2009.

74) A. Toprak, M. Tepegoz, and T. Akin, “A Column-Based Two-Stage Analog-to-Digital Converter for Uncooled Microbolometer Arrays,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXV, SPIE Vol. 7298, pp. 72982H/1-8, Orlando, U.S.A, April 2009.

73) S. E. Alper, K. Sahin, and T. Akin, “An Anaysis to Improve Stability of Drive-Mode Oscillations in Capacitive Vibratory MEMS Gyroscopes,” The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), pp. 817-820, Sorrento, Italy, Jan. 2009.

72) B. Boğa, I. E. Ocak, H. Külah, and T. Akin, Modeling of a Capacitive ∑-∆ Accelerometer System including the Noise Components and Verification with Test Results,” The 22th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), pp. 821-824, Sorrento, Italy, Jan. 2009.

71) K.Sahin, E. Sahin, S. E. Alper, and T. Akin, “A Wide-Bandwidth and High-Sensitivity Robust Microgyroscope,” 19th MicroMechanics Europe Workshop (MME 2008), pp. 97-100, Aachen, Germany, September 28-30, 2008.

70) R. Kepenek, I.E. Ocak , H. Kulah, and T. Akin, “A micro-g Resolution Microaccelerometer System with a Second-Order Sigma-Delta Readout Circuitry, Conf. on PhD Research in Microelectronics and Electronics, pp. 40-43, Istanbul, Turkey, Jun 22-25, 2008.

69) K. Topalli, O. Bayraktar, M. Unlu, O. Aydin Civi, S. Demir, and T. Akin, “Reconfigurable Antennas by RF MEMS Technology,” 30th ESA Antenna Workshop on Antennas for Earth Observation, Science, Telecommunications and Navigation Space Missions, pp.497-500, Noordwijk, The Netherlands, 27-30 May 2008.

68) M. Tepegoz, F. Civitci, and T. Akin, “An Optimum Reference Detector Design for Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694028/1-8, March 2008.

67) M. Y. Tanrikulu, F. Civitci, and T. Akin, “A New Method to Estimate the Absorption Coefficient for Uncooled Infrared Detectors,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694027/1-7, March 2008.

66) M. Tepegoz, A. Toprak, and T. Akin, “A Low Power Readout Circuit Approach for Uncooled Resistive Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIV, SPIE Vol. 6940, pp. 694026/1-8, March 2008.

65) K. Topalli, M. Unlu, I. Istanbulluoglu, H. I. Atasoy, O. Bayraktar, O. Aydin Civi, Ş. Demir, S. Koc, and T. Akin, “Reconfigurable RF MEMS Devices and Antennas,” 5th International Conference on Electrical and Electronics Engineering (ELECO 2007), pp.204-209, Bursa, Turkey, 5-9 December 2007.

64) K. Azgin, Y. Temiz, and T. Akin, “A Novel In-Operation High g-Survavible MEMS Gyroscope,” Accepted, The 6th Annual IEEE Conference on Sensors (SENSORS-07), Atlanta, Georgia, USA, October 28-31, 2007.

63) M.Unlu, H. I. Atasoy, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, "Double Stub and Triple Stub RF MEMS Impedance Tuners," Proceedings of 8th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE, Barcelona, Spain, pp.169-172, 26-29 June 2007.

62) K. Topalli, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, "Monolithically Integrated MEMS Phased Array,", Proceedings of 8th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE, Barcelona, Spain, pp.119-122, 26-29 June 2007.

61) K. Topalli, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “Dual-Frequency Reconfigurable Slot Dipole Array with a CPW-Based Feed Network using RF MEMS Technology for X- and Ku-Band Applications,” 2007 IEEE AP-S International Symposium, pp. 825-828, Honolulu, Hawaii, USA, 10-15 June 2007.

60) M. Tepegoz and T. Akin, “Resistance Non-Uniformity Correction Method Using Bias Heating for Resistive Uncooled Microbolometer FPAs,” SPIE Defense and Security Symposium, Infrared Technology and Applications XXXIII, SPIE Vol. 6542, pp. 3T1-8, April 2007.

59) K. Azgin, Y. Temiz, and T. Akin, “An SOI-MEMS Tuning Fork Gyroscope with Linearly Coupled Drive Mechanism,” The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), pp. 607-610, Kobe, Japan, January 21-25, 2007.

58) O. Bayraktar, K. Topalli, M. Unlu, O. Aydin Civi, S. Demir, and T. Akin, “Beam Switching Reflectarray using RF MEMS Technology,” European Conference on Antennas and Propagation, Edinburgh, UK, 11-16 November 2006.

57) O. Bayraktar, K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, H. I. Atasoy, O. A. Civi, S. Demir, S. Koc, T. Akin, “Reconfigurable Reflectarray using RF MEMS Technology,” European Conference on Antennas and Propagation, Nice, France, 6-10 November 2006.

56) E. Erdil, K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, H. I. Atasoy, O. Bayraktar, O. A. Civi, S. Demir, S. Koc, T. Akin, “Reconfigurable Slot Antenna with Fixed-fixed Beam Type RF MEMS Capacitors,” European Conference on Antennas and Propagation, Nice, France, 6-10 November 2006.

55) T. Akin and H. Kulah, “MEMS and Microsystem Technologies for Microsensors and Biological Microdevices,” The 7th Workshop on Biosensors and Bioanalytical u-Techniques in Environmental and Clinical Analysis, Kusadasi, Turkey, September 2006.

54) S. E. Alper, K. M. Silay, and T. Akin, “Tactical-Grade Silicon-on-Glass Gyroscope with Very-Small Quadrature Coupling,” The 19th European Conf. on Solid-State Transducers (Eurosensors XIX), Göteborg, Sweden,September 17-20, 2006.

53) K. Topalli, M. Unlu, O. Aydin Civi, S. Demir, S. Koc, and T. Akin, “A Monolithic Phased Array using 3-Bit RF MEMS Phase Shifters,” 2006 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, Albuquerque, New Mexico, USA, pp. 517-520, July 2006.

52) M. Unlu, K. Topalli, H. I. Atasoy, E. U. Temocin, I. Istanbulluoglu, O. Bayraktar, S. Demir, O. A. Civi, S. Koc, and T. Akin, “A Tunable RF MEMS Triple Stub Impedance Matching Network,” European Microwave Conference 2006, Manchester, United Kingdom, pp. 1370-1373, 10-15 September 2006.

51) H. I. Atasoy, K. Topalli, M. Unlu, I. Istanbulluoglu, O. Bayraktar, E. U. Temocin, S. Demir, O. A. Civi, S. Koc, and T. Akin, “Investigation of On-Wafer TRL Calibration Accuracy Dependence on Transitions and Probe Positioning,” European Microwave Conference 2006, Manchester, United Kingdom, pp. 1582-1585, 10-15 September 2006.

50) H. I. Atasoy, K. Topalli, M. Unlu, I. Istanbulluoglu, E. U. Temocin, O. Bayraktar, S. Demir, O. Aydin-Civi, S.Koc, and T.Akin, “Metal-to-metal and capacitive contact RF MEMS shunt switch structures,” 7th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. 154-156, Orvieto, Italy,  27-30 June 2006.

49) M. Unlu, K. Topalli, H. I. Atasoy, E. U. Temocin, I. Istanbulluoglu, O. Bayraktar, S. Demir, O. Aydin-Civi, S. Koc, and T. Akin, “A Reconfigurable RF MEMS Impedance Tuner for Impedance Matching of a Two-Stage Low Noise Amplifier,” 7th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. 115-118, Orvieto, Italy,  27-30 June 2006.

48) S. E. Alper, I. E. Ocak, and T. Akin, “Ultra-Thick and High-Aspect-Ratio Nickel Microgyroscope Using EFAB Multi-Layer Additive Electroforming Process,” The 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), pp. 670-673, Istanbul, Turkey, January 22-26, 2006.

47) S. E. Alper, K. Azgin, and T. Akin, “High-Performance SOI-MEMS Gyroscope with Decoupled Oscillation Modes,” The 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), pp. 70-73, Istanbul, Turkey,January 22-26, 2006.

46) S. E. Alper, K. M. Silay, and T. Akin, “A Low-Cost Rate-Grade Nickel Microgyroscope,” The 19th European Conf. on Solid-State Transducers (Eurosensors XIX), Barcelona, Spain,September 11-14, 2005.

45) S. Onat, M. Unlu, L. Alatan, S. Demir, and T. Akin, “Design of a re-configurable dual frequency microstrip antenna with integrated RF MEMS switches,” IEEE Antennas and Propagation Society International Symposium, Volume: 2A, pp 384- 387, 3-8 July 2005.

44) E. Erdil, K. Topalli, O. Aydin Civi, and T. Akin, “Reconfigurable CPW-Fed Dual-Frequency Rectangular Slot Antenna Using RF MEMS Technology,” 2005 AP-S International Symposium and USNC/URSI National Radio Science Meeting, Vol. 2A, pp. 392-395, Washington, DC, 3-8 July 2005.

43) E. Erdil, S. Onat, K. Topalli, I. Istanbulluoglu, M. Unlu, S. Demir, L. Alatan, O. Aydin Civi, S. Koc, and T. Akin, “Reconfigurable Antenna Structures Using MEMS Technology,” 6th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. 35-38, Switzerland, 23-24 June 2005.

42) M. Unlu, K. Topalli, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A  Parametric Study On Modeling Distributed Mems Transmission Lines”, 34th European Microwave Conference, pp.1157-1160, Amsterdam, The Netherlands, October 11‑15, 2004.

41) M. Unlu, K. Topalli, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “Design and Modeling of a Reconfigurable Triple Stub Impedance Matching Network using Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. I17-I20, Uppsala, Sweden, 30 June-2 July 2004.

40) K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A Parametric Modeling Study on Distributed MEMS Transmission Lines,” 5th Workshop on MEMS for MilimeterWave Communications (MEMSWAVE), pp. I13-I16 Uppsala, Sweden, 30 June-2 July 2004.
39) K. Topalli, M. Unlu, H. Sagkol,  S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “A New Model for Distributed MEMS Transmission Lines,” 2004 AP-S International Symposium and USNC/URSI National Radio Science Meeting, pp. 2855-2858, Monterey, California, 20-26 June 2004.
38) B. Okcan and T. Akin, “A Thermal Conductivity Based Humidity Sensor in a Standard CMOS Process,” The 17th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2004), pp. 552-555, Maastricht, The Netherlands,January 25-29, 2004.

37) S.E. Alper and T. Akin, “A Symmetrical and Decoupled Nickel Microgyroscope on Insulating Substrate,” The 17th European Conf. on Solid-State Transducers (Eurosensors XVII), pp. 24-27, Guimaraes, Portugal, September 21-24, 2003.

36) M. Tepegoz and T. Akin, “A Redout Circuit for QWIP Infrared Detector Arrays using Current Mirroring Integration,” European Solid-State Circuits Conference (ESSCIRC 2003), pp. 133-136, Estoril, Portugal, September 16-18, 2003.

35) D. Harris and T. Akin, “A Cross-Cultural VLSI Design Project,” The American Society for Engineering Education (ASEE) 2003 Annual Conference, Nashville, Tennessee, June 22-25, 2003. paper35.pdf

34) S. Eminoglu, M.Y. Tanrikulu, and T. Akin, “Low-Cost 64x64 Uncooled Infrared Detector Arrays in Standard CMOS,” The 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV), pp. 316-319, Boston, Massachusetts, June 8-12, 2003.

33) S.E. Alper and T. Akin, “A Single-Crystal Silicon Symmetrical and Decoupled Gyroscope on Insulating Substrate,” The 12th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'03, Eurosensors XV), pp. 1399-1402, Boston, Massachusetts, June 8-12, 2003.

32) S. Eminoglu, M.Y. Tanrikulu, and T. Akin, “Low-Cost Uncooled Infrared Detector Arrays in Standard CMOS,” SPIE AeroSense Symposium, Infrared Technology and Applications XXIX (Aerosense 2003), SPIE Vol. 5074, pp. 425-436, Orlando, Florida, April 21-25, 2003.

31) B. Koç, D. Basaran, T. Akin, and A. Erden, “Design of a Piezoelectric Ultrasonic Motor for Micro-Robotic Application,” Int. Conf. Mechatronic Design and Modeling, pp. 205-219, Ürgüp, Turkey, Sept. 2002.

30) S. Eminoglu, D. Sabuncuoglu Tezcan, M.Y. Tanrikulu, and T. Akin, "Low-Cost Uncooled Infrared Detectors in CMOS Process,"  The 16th European Conf. on Solid-State Transducers (Eurosensors XVI), pp. 480-483, Prague, Czech Republic, September 15-18, 2002.

29) S.E. Alper and T. Akin, "A Symmetrical and Decoupled Microgyroscope with Electroforming Process on Insulating Substrate," The 16th European Conf. on Solid-State Transducers (Eurosensors XVI), pp. 814-817, Prague, Czech Republic, September 15-18, 2002.

28) M. Ünlü, K. Topalli, H. Sagkol,  S. Demir, Ö. Aydin Çivi, S. Koç, and T. Akin, "New MEMS Swich Structures for Antenna Applications," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, p.134, San Antonio, Texas, 16-21 June 2002.

27) M. Ünlü, K. Topalli, H. Sagkol,  S. Demir, Ö. Aydin Çivi, S. Koç, and T. Akin, "RF MEMS Adjustable Impedance Matching Network and Adjustable Power Divider," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, pp. 26-29, San Antonio, Texas, 16-21 June 2002.

26) H. Sagkol, K. Topalli, M. Ünlü, Ö. Aydin Çivi, S. Koç, S. Demir, and T. Akin, "A Monolithic Phased Array with RF MEMS Technology," 2002 IEEE AP-S International Symposium and USNC/URSI National Radio Science Meeting, pp. 760-763, San Antonio, Texas, 16-21 June 2002.

25) S.E. Alper and T. Akin, "Optimum Designs For High-Performance Micromachined Gyroscopes," NATO RTO Sensors & Electronics Technology (RTO-SET) Panel: Symposium on Emerging Military Capabilities Enabled by Advances in Navigation Sensors, Istanbul, 14-16 October 2002.

24) S. Eminoglu, M.Y. Tanrikulu, D. Sabuncuoglu Tezcan, and T. Akin, "A Low-Cost, Small Pixel Uncooled Infrared Detector for Large Focal Plane Arrays using a Standard CMOS Process," SPIE AeroSense Symposium, Infrared Technology and Applications XXVIII (Aerosense 2002), SPIE Vol. 4721, pp. 111-121, Orlando, Florida, April 1-5, 2002.

23) S.E. Alper and T. Akin, "A Symmetric Surface Micromachined Gyroscope with Decoupled Oscillation Modes," The 11th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'01, Eurosensors XV), pp. 456-459, Munich, Germany, June 10-14, 2001. paper23.pdf

22) S. Eminoglu, D.S. Tezcan, and T. Akin, "CMOS N-Well Microbolometer FPA with Temperature Coefficient Enhancement Circuitry," SPIE AeroSense Symposium, Infrared Technology and Applications XXVII (Aerosense 2001), SPIE Vol. 4369, pp. 240-249, Orlando, Florida, April 16-20, 2001.

21) D.S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "An Uncooled Microbolometer Infrared Focal Plane Array in Standard CMOS," Photodetector Materials and Devices VI (Opto-electronics 2001), SPIE Vol. 4288, January 20-26, 2001.

20) D.S. Tezcan, S. Eminoglu, O. S. Akar, and T. Akin, "A Low Cost Uncooled Infrared Microbolometer Focal Plane Array Using the CMOS N-Well Layer," The 14th IEEE Int. MicroElectroMechanical Systems Conf. (MEMS 2001), pp. 566-569, Interlaken, Switzerland, January 21-25, 2001. paper20.pdf

19) S.S. Akbay, A. Bircan, and T. Akin, "A CMOS Visible Image Sensor Array Using Current Mirroring Integration Readout Circuitry," The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), pp. 21-24, Copenhagen, Denmark, August 27-30, 2000. paper19.pdf

18) S.E. Alper and T. Akin, "A Planar Gyroscope Using a Standard Surface Micromachining Process," The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), pp. 387-390, Copenhagen, Denmark, August 27-30, 2000. paper18.pdf

17) O. Akar, T. Akin, T. Harpster, and K. Najafi, "A Wireless Batch Sealed Absolute Capacitive Pressure Sensor," The 14th European Conf. on Solid-State Transducers (Eurosensors XIV), pp. 585-588, Copenhagen, Denmark, August 27-30, 2000. paper17.pdf

16) H. Kulah and T. Akin, "A High Performance Readout Circuit for Infrared Focal Plane Array Applications," Invited to Design Automation Conference 2000, Los Angeles, California, June 2000.

15) D.S. Tezcan, F. Kocer, and T. Akin, "An Uncooled Microbolometer Infrared Detector in any Standard CMOS Technology," The 10th Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'99), pp. 610-613, Sendai, Japan, June 7-10, 1999. paper15.pdf

14) A. Tezel and T. Akin, "A Low Power Switched-Current Algorithmic A/D Converter," IEEE Int. Sym. on Circuits and Systems, Vol. I, pp. 282-285, Orlando, Florida, June 1999. paper14.pdf

13) H. Kulah and T. Akin, "An Infrared FPA Readout Circuit Based on Current Mirroring Integration," SPIE AeroSense Symposium, Infrared Technology and Applications XXV, SPIE Vol. 3698, pp. 778-788, Orlando, Florida, April 1999.

12) S. Eminoglu and T. Akin, "A CAD Environment for Digital Filters using A VerilogHDL Based Functional Bit-Serial Compiler," 10th Int. Conf. on Microelectronics, Monastir, pp. 91-94, Tunisia, December 1998.

11) H. Kulah and T. Akin, "A CMOS Current Mirroring Integration Readout Structure for Infrared Focal Plane Arrays," European Solid-State Circuits Conference, pp. 468-471, The Hague, The Netherlands, September 1998.

10) Z. Olgun, O. Akar, H. Kulah, and T. Akin, "An Integrated Thermopile Structure with High Responsivity and Detectivity in Any Standard CMOS Technology," Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'97), pp. 1263-1266, Chicago, June 1997.

9) T. Akin, B. Ziaie, and K. Najafi, "A Modular Micromachined High-Density Connector for Implantable Biomedical Systems," IEEE Micro-Electro-Mechanical-Systems Workshop (MEMS-96), pp. 497-502, San Diego, California, February 1996.

8) R. M. Bradley, T. Akin, S. Gurkan, X. Cao, and K. Najafi, "Chronic Recordings from Fibers of Rat Glossopharyngeal Nerve Regenerated Through a Micromachined Sieve Electrode Array,"” AChemS XVII (Ass. for Chemoreception Sciences), Sarasota, Florida, April, 1995.

7) T. Akin, K. Najafi, and R. M. Bradley, "An Implantable Multichannel Digital Neural Recording System for a Micromachined Sieve Electrode," Digest, Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS’95-EUROSENSORS’IX), pp. 51-54, Stockholm, June 1995.

6) R. M. Bradley, T. Akin, S. Gurkan, and K. Najafi, "Long Term Recordings from a Micromachined Sieve Electrode Implanted in the Rat Glossopharyngeal Nerve," Digest, Society for Neuroscience, Nov., 1994.

5) T. Akin, "Silicon Micromachining and Microfabrication Techniques for Integrated Sensor and Actuator Systems," IEEE Mediterranean Electrotechnical Conference (MELECON'94), pp. 529-532, Antalya, Turkey, April, 1994.

4) T. Akin and K. Najafi, "A telemetricly Powered and Controlled Implantable Neural Recording System with CMOS Interface Circuitry and Micromachined Silicon Sieve Electrode," IEEE Mediterranean Electrotechnical Conference (MELECON'94), pp. 545-548, Antalya, Turkey, April, 1994.

3) R. M. Bradley, R. Smoke, T. Akin, and K. Najafi, "Functional Regeneration of Glossopharyngeal Nerve Through Micromachined Sieve Electrodes," AChemS XIV (Ass. for Chemoreception Sciences), April, 1992.

2) T. Akin and K. Najafi, "A Micromachined Silicon Sieve Electrode for Nerve Regeneration Applications," IEEE Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERS'91), pp. 128-131, San Francisco, CA, June 1991.

1) T. Akin, B. Ziaie, and K. Najafi, "RF Telemetry Powering and Control of Hermetically-Sealed Integrated Sensors and Actuators," Digest, IEEE Solid-State Sensors and Actuators Workshop, pp. 145-148, Hilton Head, SC, June 1990.

National Journal and Conference Publications

28) E. Yıldırım, T. Akın ve M. A. S. Arıkan “MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi,” Çankaya Üniversitesi Journal of Science and Engineering, Vol. 9 No. 1, pp.9-23, Ankara, Şubat 2012 (in Turkish).

27) O. Bayraktar, O. Aydın-Civi ve T. Akin “RF MEMS Anahtarlı Ayarlanabilir Yansıtıcı Dizi Anteni,” URSI Türkiye 5. Bilimsel Kongresi, pp.132-135, Ankara, Ağustos 2010 (in Turkish).

26) M. F. Toy, O. Ferhanoglu, O. Akar, T. Akin, H. Ürey, "Sogutmasiz Kizilötesi Termomekanik Algilayici Tasarimi, Üretimi ve Testi," 10. Ulusal Fotonik Çalistayi, Kocaeli Üniversitesi, Kocaeli, Ekim 2008 (in Turkish)

25) C. Cetintepe, S. Demir, and T. Akin, "RF MEMS Teknolojisi ile S-Bandi Tumlesik Bant-Geciren Filtre Yapisi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 137-140, Ekim 2008, Antalya (in Turkish).

24) K. Topalli, I. Comart, S. Demir, and T. Akin, "RF MEMS Yapıların Glass Frit ile 0-seviye Paketlenmesi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 110-113, Ekim 2008, Antalya (in Turkish).

23) E. Ekmekci, K. Topalli, and T. Akin, G. Turhan-Sayan, "RF-MEMS Anahtarlama Teknigi ile AHR Tipi Metamalzemelerde Manyetik Rezonans Frekansinin Adaptif Bicimde Ayarlanmasi," URSI-Türkiye 2008 4. Bilimsel Kongresi, s. 106-109, Ekim 2008, Antalya (in Turkish).

22) T. Akin, “Radio Frequency Micro-Electro-Mechanical Systems (RF MEMS),” Invited, National URSI Symposium Turkey, p. 11, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

21) E. U. Temoçin, K. Topalli, M. Ünlü, I. Istanbulluoglu, H. I. Atasoy, , Ö. Bayraktar, S. Demir, Ö. Aydin Çivi, S. Koç, T. Akin, “Esdüzlemsel Dalga Klavuzundan Mikroserit Hatta Geçis Üzerine Çalismalar,” National URSI Symposium Turkey, pp. 448-450, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

20) Ö. Bayraktar, K. Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, H. I. Atasoy, S. Demir, Ö. Aydin Çivi, S. Koç, T. Akin, “RF MEMS Teknolojisi ile Yansitici Dizi Anteni Tasarimi,” National URSI Symposium Turkey, pp. 438-440, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

19) H. I. Atasoy, M. Ünlü, K. Topalli, I. Istanbulluoglu, E. U. Temoçin, Ö. Bayraktar, S. Demir, Ö. Aydin Çivi, S. Koç, T. Akin, “TRL Kalibrasyonunda Uç Konumlandirmasi ve Geçislerin Etkileri,” National URSI Symposium Turkey, pp. 426-428, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

18) I. Istanbulluoglu, K. Topalli, E. U. Temoçin, H. I. Atasoy, M. Ünlü, Ö. Bayraktar, S. Demir, Ö. Aydin Çivi, S. Koç, T. Akin, “RF MEMS Tekonolojisi Kullanilarak Tasarlanmis Ayarlanabilir Bant Geçiren Baglanmis-Hat Süzgeç,” National URSI Symposium Turkey, pp. 416-418, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

17) K. Topalli, M. Ünlü, Ö. Aydin Çivi, S. Demir, S. Koç, T. Akin, “RF MEMS Teknolojisi ile Tek Parça Faz Dizili Anten Yapisi,” National URSI Symposium Turkey, pp. 413-415, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

16) H. I. Atasoy, K. Topalli, M. Ünlü, I. Istanbulluoglu, E. U. Temoçin, Ö. Bayraktar, S. Demir, Ö. Aydin Çivi, S. Koç, T. Akin, “RF MEMS Tekonolojisi ile Kapasitif ve Metal-Metal Baglantili Paralel Anahtar Yapilari”, National URSI Symposium Turkey, pp. 410-412, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

15) Mehmet Ünlü, Kagan Topalli, Simsek Demir, Özlem Aydin Çivi, Sencer Koç, Tayfun Akin, “RF MEMS Teknolojisi ile Ayarlanabilir Empedans Uyumlama Devresi,” National URSI Symposium Turkey, pp. 407-409, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

14) E. Erdil, K. Topalli, M. Ünlü, Ö. Aydın Çivi, T. Akin, “RF MEMS Kapasitörler ile Rezonans Frekansi Ayarlanabilen Antenler,” National URSI Symposium Turkey, pp. 404-406, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

13) Ö. Pasin, T. Akin, “RF MEMS Yapilarinin Vakum Testi Için Pirani Gauge,” National URSI Symposium Turkey, pp. 386-388, Hacettepe, Ankara, Türkiye, 6-8 Eylül 2006 (in Turkish).

12) K. Topalli, M. Unlu, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “RF MEMS teknolojisi ile mikroserit ve esduzlemsel dalga kilavuzu hat ustunde paralel anahtar yapilari,” National URSI Symposium Turkey, pp. 370-372, 8-10 September 2004 (in Turkish).

11) M. Unlu, K. Topalli, S. Demir, O. Aydin Civi, S. Koc, and T. Akin, “Siralanmis MEMS iletim hatlari icin yeni bir model,” National URSI Symposium Turkey, pp. 435-437, 8-10 September 2004 (in Turkish).

10) K. Topalli, H. Sagkol, M. Ünlü, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Faz Dizili Anten," URSI-Türkiye'2002, s. 134-137, Eylül 2002 (in Turkish).

9) H. Sagkol, M. Ünlü, K. Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Mikrodalga Faz Kaydiricilari," URSI-Türkiye'2002, s. 138-141, Eylül 2002 (in Turkish).

8) M. Ünlü, H. Sagkol, K. Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "RF MEMS Teknolojisi ile Ayarlanabilir Empedans Uyumlama ve Güç Bölücü Devreleri," URSI-Türkiye'2002, s. 142-145, Eylül 2002 (in Turkish).

7) M. Ünlü, H. Sagkol, K. Topalli, Ö. Aydin Çivi, S. Demir, S. Koç ve T. Akin, "Anten Uygulamalari için Yeni MEMS Anahtar Yapilari," URSI-Türkiye'2002, s. 146-149, Eylül 2002 (in Turkish).

6) H. Kulah ve T. Akin, "CMOS Elektronik Devreli PtSi Schottky-Bariyer Kýzýlötesi Gece-Görüþ Dedektörü," Kaynak Elektrik Dergisi, Sayfa 103-110, 1997/1 (in Turkish).

5) Tayfun Akin, "Mikro-Elektro-Mekanik Sistemler (MEMS) ve Silisyum Mikroisleme Teknikleri," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, Cagrili Bildiri, Eylul, 1997 (in Turkish).

4) Z. Olgun, O. Akar, H. Kulah ve T. Akin, "Standart CMOS Teknolojisi ile Üretilebilen Isýlküme Tipi Kýzýlötesi Dedektörler," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, s. 75-78, Eylul, 1997 (in Turkish).

3) O. Akar ve T. Akin, "Endüstriyel ve Biyomedikal Uygulamalarý için Silisyum Mikroiþlenmiþ Kapasitif Basýnç Sensörü," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, s. 83-86, Eylul, 1997 (in Turkish).

2) H. Kulah ve T. Akin, "PtSi Schottky-Bariyer Gece-Görüþ Dedektörü ve CMOS Elektronik Okuma Devresi Tasarýmý," Elektrik-Elektronik-Bilgisayar Muhendisligi 7. Ulusal Kongresi, s. 79-82, Eylul, 1997 (in Turkish).

1) Tayfun Akin, "Micro-Electro-Mechanical Systems (MEMS) and Silicon Micromachining Technologies," Digest, IEEE Conf. for Electrical & Computer Engineering Students, pp. 43-48, Bogazici University, September 1997